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T O P I C    R E V I E W
jmit Posted - 01/11/2011 : 11:30:02 AM
latest origin 8.1 version

Dear collabs,

I am looking for a way to do some good wafer maps with Origin. Some examples can be found here:
http://www.java2s.com/Code/Java/Chart/JFreeChartWaferMapChartDemo.htm
or there (commercial tool: 1800euro per license !!!)
http://www.eh-metrology.com/products/software/waferstudio.html?gclid=CIqdvOPEsqYCFY9O4QodWj79Xw br /

One of my issue is that some data are missing in my matrix. I tried to put 0 instead or clear out the value but the 3D plot tool available in Origin still considers these data as valuable values. As you will see below, the result is not as good as I expect.

Please, I will appreciate if somebody can help me out (not only me actually but all the semiconductor industry will appreciate ;-)

Thanks

Best regards,

jm


7   L A T E S T    R E P L I E S    (Newest First)
larry_lan Posted - 01/18/2011 : 09:45:53 AM
Hi:

By default, Origin shows Row/Column index in matrix. You can switch to actual X/Y value from menu "View : Show X/Y".

Thanks
Larry
jmit Posted - 01/18/2011 : 07:41:50 AM
Hi Sam,

I have done what you wrote but I observed that the XYZ conversion is not correct.

Indeed, I got this:
1 4 1063
1 5 1052
1 6.5 1041
1.9 3 1050
1.9 4.5 1003
1.9 5.5 1045
1.9 7.5 1008
2.8 3.5 1022
2.8 5 988.4
2.8 6.5 1015
2.8 8 1041
3.7 4 948.1
3.7 5.5 997.1
3.7 7 1006
3.7 8.5 994.4
4.6 2.5 1005
4.6 4.5 934.3
4.6 6 976.6
4.6 7.5 999.2
4.6 9 1050
5.5 1 1061
5.5 2 1052
5.5 3 1004
5.5 4 976.1
5.5 5 975.1
5.5 6.5 962.4
5.5 8 1018
5.5 9.5 1019
6.4 3.5 1002
6.4 5.5 1016
6.4 7 1025
6.4 8.5 1025
6.4 10 1022
7.3 2 1061
7.3 4 1008
7.3 6 1026
7.3 8 1044
8.2 4.5 1001
8.2 6.5 1046
8.2 7.5 1027
8.2 8.5 1057
9.1 3 1072
9.1 5 1024
9.1 7 1031
10 5.5 1061
10 7.5 1046

but why do you have digits in the X and Y columns? Normally, we should not get this since row / colum of the origin matrix are only integer

thx for the feedback

Best regards,

Jerome
Sam Fang Posted - 01/17/2011 : 01:01:04 AM
In Origin8.1's menu, select Matrix: Convert to Worksheet. In the opened dialog, choose XYZ Columns method. But it will also produce rows for missing values. In Origin8.1 you have to delete them manually before contour plot. You can use Sort Worksheet to find all rows of missing values.

We have fixed it in our latest 8.5 build. It will be released soon, which can support missing values better.

Thanks for reporting it.

Sam
OriginLab Technical Services
jmit Posted - 01/16/2011 : 05:40:07 AM
Thanks for your help.
Glad to see that you are working about this new feature in Orign 9.

Small extra question: Is there a simple way to convert my matrix to a XYZ data worksheet? like x=row of my matrix; y= colunm; values

thx

-Jmit
Sam Fang Posted - 01/12/2011 : 05:16:35 AM
Hi Jerome,

Thanks for your project file.

I found too many missing values in your matrix data. In Origin8.1's 3D surface plot, 2*2 grids will not be shown if there are more than one missing value in these 2*2 grids.

But this will be improved in Origin9.0. For contour plots using matrix, cells for non-missing values in matrix should be connected.

However for your data you can plot contours using XYZ columns in worksheet. First convert matrix data to worksheet with XYZ columns, then delete rows for missing values (use Sort Worksheet to find all rows for missing values), finally you can plot contours using XYZ columns. Following contour graph is created for your data in Origin with 8 Major Levels.


Sam
OriginLab Technical Services
jmit Posted - 01/12/2011 : 03:49:47 AM
Thanks Sam.
I just sent you the worksheet by ftp
I will post the result for others if the result is conclusive.

thanks for your support

-Jerome
Sam Fang Posted - 01/12/2011 : 03:15:24 AM
Origin8.1SR3 supports missing values in Matrix Sheet for 3D Surface plot. Don't put 0 instead. Can you send us your matrix data for wafer maps? Then we can try to create the simiar graph to those you showed.

To upload a file, see
http://www.originlab.com/index.aspx?go=Support&pid=752

Thanks.

Sam
OriginLab Technical Services

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